板編號#3
槽液濃度 H2SO4=167g/L 溫度32.7 / 32.7Degree C
H2O2=57g/L 線速3.5m / min
Cu=<40g/L
TOP Side 1 2 3 4 5 6 7 8 9 10 11 Avg  Amount
1 微蝕前 64.71 63.89 64.14 64.90 65.09 64.97 64.27 63.83 63.83 64.90 64.65 64.47 5.11
微蝕後 59.25 60.45 60.04 58.39 58.90 58.16 59.55 58.79 59.85 59.25 60.33 59.36
2 微蝕前 64.90 65.42 63.71 65.16 63.89 64.97 64.08 65.16 65.35 64.25 65.55 64.77 5.69
微蝕後 58.05 58.67 59.08 59.14 59.61 58.73 58.50 59.20 59.25 59.73 59.86 59.07
3 微蝕前 64.33 64.71 65.03 65.35 65.35 64.52 64.39 65.50 65.22 65.61 65.48 65.04 5.85
微蝕後 58.39 57.93 59.61 58.96 59.25 59.61 58.96 59.97 59.14 60.15 59.20 59.20
4 微蝕前 64.08 65.29 64.77 65.22 65.81 63.13 65.03 64.58 65.74 62.29 64.97 64.63 5.81
微蝕後 59.25 58.27 58.22 58.39 59.37 59.49 59.73 59.08 59.20 58.44 57.54 58.82
5 微蝕前 63.40 63.71 64.90 64.65 64.52 64.02 63.13 64.84 63.40 63.77 63.65 64.00 4.96
微蝕後 58.27 58.85 58.90 57.99 59.25 59.67 59.25 59.37 60.21 58.33 59.31 59.04
6 微蝕前 64.08 64.65 64.65 65.42 64.14 64.52 64.46 64.27 65.42 64.08 64.27 64.54 4.86
微蝕後 58.62 59.55 59.67 60.21 60.33 59.37 59.91 59.56 60.03 59.67 59.55 59.68
7 微蝕前 63.46 64.52 65.03 64.14 65.22 64.20 64.52 64.97 64.39 64.77 64.52 64.52 5.84
微蝕後 58.43 58.73 58.79 58.79 58.05 58.73 59.14 59.08 59.14 57.43 59.14 58.68
8 微蝕前 62.02 65.03 63.40 63.46 63.52 63.71 63.58 64.20 63.89 64.58 63.27 63.70 5.67
微蝕後 58.16 57.21 57.43 57.60 57.60 58.14 57.38 58.96 59.02 59.08 57.71 58.03
9 微蝕前 61.76 63.65 63.27 60.70 61.51 62.02 63.40 62.80 62.67 62.93 61.20 62.36 5.35
微蝕後 56.72 58.85 57.16 56.62 57.04 56.25 56.51 57.27 57.16 56.45 56.99 57.00
Bottom Side 1 2 3 4 5 6 7 8 9 10 11 Avg Amount
1 微蝕前 64.77 65.09 64.39 64.27 64.58 64.20 64.08 64.52 65.22 65.68 62.57 64.49 5.21
微蝕後 59.37 58.90 60.27 59.55 59.15 60.15 58.90 58.79 59.31 60.03 57.60 59.27
2 微蝕前 63.89 65.29 65.42 64.52 65.61 63.95 64.33 64.27 65.29 64.52 65.16 64.75 5.33
微蝕後 58.56 59.73 59.37 60.39 59.73 59.55 59.51 59.37 59.25 59.67 58.50 59.42
3 微蝕前 64.46 64.84 65.16 65.55 64.77 64.27 63.71 64.84 64.14 64.39 65.48 64.69 5.02
微蝕後 58.67 59.61 61.01 59.97 59.55 59.25 58.01 60.21 60.01 60.45 59.61 59.67
4 微蝕前 64.39 64.48 64.58 65.29 64.77 64.20 65.09 65.35 64.90 65.29 63.89 64.75 5.28
微蝕後 58.85 59.67 59.79 60.33 59.79 59.49 60.01 59.51 59.51 59.25 57.97 59.47
5 微蝕前 64.46 64.39 65.03 64.27 65.09 65.16 64.39 64.33 65.03 65.03 64.39 64.69 5.18
微蝕後 57.99 59.85 60.07 60.33 60.27 58.90 59.79 59.37 59.97 59.61 58.39 59.50
6 微蝕前 64.14 64.65 65.35 63.85 64.97 63.52 63.20 65.09 63.89 64.14 63.71 64.23 4.93
微蝕後 59.14 59.91 59.31 59.61 59.61 58.90 59.25 58.73 58.56 59.73 59.49 59.29
7 微蝕前 64.52 64.58 65.55 64.90 65.15 64.97 62.67 64.97 64.14 65.94 64.52 64.72 5.08
微蝕後 57.82 59.08 60.15 60.21 59.37 60.21 59.31 60.03 59.67 60.03 60.15 59.64
8 微蝕前 63.27 63.95 63.95 63.89 64.71 63.13 63.71 63.65 64.90 63.65 63.33 63.83 4.98
微蝕後 58.27 58.62 58.62 59.31 59.31 58.17 59.37 59.08 59.49 58.56 58.56 58.85
9 微蝕前 63.00 63.13 61.96 62.34 63.00 61.01 63.07 63.58 64.08 64.46 62.02 62.88 5.74
微蝕後 56.35 57.38 56.19 55.35 56.56 58.22 58.50 56.94 57.60 58.90 56.51 57.14
.
  Max Min R S Average Uniformity Etch Amount (Avg)
Top Side 微蝕前 65.81 60.70 5.11 1.02 64.23 3.98% 5.46
微蝕後 60.45 56.25 4.20 0.98 58.76 3.57%
Bottom Side 微蝕前 65.94 61.01 4.93 0.89 64.34 3.83% 5.20
微蝕後 61.01 55.35 5.66 1.02 59.14 4.79%