板編號#3
槽液濃度		H2SO4=167g/L				溫度32.7 / 32.7Degree C
		H2O2=57g/L				線速3.5m / min
		Cu=<40g/L
TOP Side		1	2	3	4	5	6	7	8	9	10	11	Avg	Amount
1	微蝕前	64.71	63.89	64.14	64.90	65.09	64.97	64.27	63.83	63.83	64.90	64.65	64.47	5.11
	微蝕後	59.25	60.45	60.04	58.39	58.90	58.16	59.55	58.79	59.85	59.25	60.33	59.36
2	微蝕前	64.90	65.42	63.71	65.16	63.89	64.97	64.08	65.16	65.35	64.25	65.55	64.77	5.69
	微蝕後	58.05	58.67	59.08	59.14	59.61	58.73	58.50	59.20	59.25	59.73	59.86	59.07
3	微蝕前	64.33	64.71	65.03	65.35	65.35	64.52	64.39	65.50	65.22	65.61	65.48	65.04	5.85
	微蝕後	58.39	57.93	59.61	58.96	59.25	59.61	58.96	59.97	59.14	60.15	59.20	59.20
4	微蝕前	64.08	65.29	64.77	65.22	65.81	63.13	65.03	64.58	65.74	62.29	64.97	64.63	5.81
	微蝕後	59.25	58.27	58.22	58.39	59.37	59.49	59.73	59.08	59.20	58.44	57.54	58.82
5	微蝕前	63.40	63.71	64.90	64.65	64.52	64.02	63.13	64.84	63.40	63.77	63.65	64.00	4.96
	微蝕後	58.27	58.85	58.90	57.99	59.25	59.67	59.25	59.37	60.21	58.33	59.31	59.04
6	微蝕前	64.08	64.65	64.65	65.42	64.14	64.52	64.46	64.27	65.42	64.08	64.27	64.54	4.86
	微蝕後	58.62	59.55	59.67	60.21	60.33	59.37	59.91	59.56	60.03	59.67	59.55	59.68
7	微蝕前	63.46	64.52	65.03	64.14	65.22	64.20	64.52	64.97	64.39	64.77	64.52	64.52	5.84
	微蝕後	58.43	58.73	58.79	58.79	58.05	58.73	59.14	59.08	59.14	57.43	59.14	58.68
8	微蝕前	62.02	65.03	63.40	63.46	63.52	63.71	63.58	64.20	63.89	64.58	63.27	63.70	5.67
	微蝕後	58.16	57.21	57.43	57.60	57.60	58.14	57.38	58.96	59.02	59.08	57.71	58.03
9	微蝕前	61.76	63.65	63.27	60.70	61.51	62.02	63.40	62.80	62.67	62.93	61.20	62.36	5.35
	微蝕後	56.72	58.85	57.16	56.62	57.04	56.25	56.51	57.27	57.16	56.45	56.99	57.00
Bottom Side		1	2	3	4	5	6	7	8	9	10	11	Avg	Amount
1	微蝕前	64.77	65.09	64.39	64.27	64.58	64.20	64.08	64.52	65.22	65.68	62.57	64.49	5.21
	微蝕後	59.37	58.90	60.27	59.55	59.15	60.15	58.90	58.79	59.31	60.03	57.60	59.27
2	微蝕前	63.89	65.29	65.42	64.52	65.61	63.95	64.33	64.27	65.29	64.52	65.16	64.75	5.33
	微蝕後	58.56	59.73	59.37	60.39	59.73	59.55	59.51	59.37	59.25	59.67	58.50	59.42
3	微蝕前	64.46	64.84	65.16	65.55	64.77	64.27	63.71	64.84	64.14	64.39	65.48	64.69	5.02
	微蝕後	58.67	59.61	61.01	59.97	59.55	59.25	58.01	60.21	60.01	60.45	59.61	59.67
4	微蝕前	64.39	64.48	64.58	65.29	64.77	64.20	65.09	65.35	64.90	65.29	63.89	64.75	5.28
	微蝕後	58.85	59.67	59.79	60.33	59.79	59.49	60.01	59.51	59.51	59.25	57.97	59.47
5	微蝕前	64.46	64.39	65.03	64.27	65.09	65.16	64.39	64.33	65.03	65.03	64.39	64.69	5.18
	微蝕後	57.99	59.85	60.07	60.33	60.27	58.90	59.79	59.37	59.97	59.61	58.39	59.50
6	微蝕前	64.14	64.65	65.35	63.85	64.97	63.52	63.20	65.09	63.89	64.14	63.71	64.23	4.93
	微蝕後	59.14	59.91	59.31	59.61	59.61	58.90	59.25	58.73	58.56	59.73	59.49	59.29
7	微蝕前	64.52	64.58	65.55	64.90	65.15	64.97	62.67	64.97	64.14	65.94	64.52	64.72	5.08
	微蝕後	57.82	59.08	60.15	60.21	59.37	60.21	59.31	60.03	59.67	60.03	60.15	59.64
8	微蝕前	63.27	63.95	63.95	63.89	64.71	63.13	63.71	63.65	64.90	63.65	63.33	63.83	4.98
	微蝕後	58.27	58.62	58.62	59.31	59.31	58.17	59.37	59.08	59.49	58.56	58.56	58.85
9	微蝕前	63.00	63.13	61.96	62.34	63.00	61.01	63.07	63.58	64.08	64.46	62.02	62.88	5.74
	微蝕後	56.35	57.38	56.19	55.35	56.56	58.22	58.50	56.94	57.60	58.90	56.51	57.14
												.
			Max	Min	R	S	Average	Uniformity		Etch Amount (Avg)
	Top Side	微蝕前	65.81	60.70	5.11	1.02	64.23	3.98%		5.46
		微蝕後	60.45	56.25	4.20	0.98	58.76	3.57%
	Bottom Side	微蝕前	65.94	61.01	4.93	0.89	64.34	3.83%		5.20
		微蝕後	61.01	55.35	5.66	1.02	59.14	4.79%