板編號#3 |
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槽液濃度 |
H2SO4=167g/L |
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溫度32.7 / 32.7Degree C |
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H2O2=57g/L |
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線速3.5m / min |
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Cu=<40g/L |
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TOP Side |
1 |
2 |
3 |
4 |
5 |
6 |
7 |
8 |
9 |
10 |
11 |
Avg |
Amount |
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1 |
微蝕前 |
64.71 |
63.89 |
64.14 |
64.90 |
65.09 |
64.97 |
64.27 |
63.83 |
63.83 |
64.90 |
64.65 |
64.47 |
5.11 |
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微蝕後 |
59.25 |
60.45 |
60.04 |
58.39 |
58.90 |
58.16 |
59.55 |
58.79 |
59.85 |
59.25 |
60.33 |
59.36 |
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2 |
微蝕前 |
64.90 |
65.42 |
63.71 |
65.16 |
63.89 |
64.97 |
64.08 |
65.16 |
65.35 |
64.25 |
65.55 |
64.77 |
5.69 |
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微蝕後 |
58.05 |
58.67 |
59.08 |
59.14 |
59.61 |
58.73 |
58.50 |
59.20 |
59.25 |
59.73 |
59.86 |
59.07 |
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3 |
微蝕前 |
64.33 |
64.71 |
65.03 |
65.35 |
65.35 |
64.52 |
64.39 |
65.50 |
65.22 |
65.61 |
65.48 |
65.04 |
5.85 |
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微蝕後 |
58.39 |
57.93 |
59.61 |
58.96 |
59.25 |
59.61 |
58.96 |
59.97 |
59.14 |
60.15 |
59.20 |
59.20 |
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4 |
微蝕前 |
64.08 |
65.29 |
64.77 |
65.22 |
65.81 |
63.13 |
65.03 |
64.58 |
65.74 |
62.29 |
64.97 |
64.63 |
5.81 |
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微蝕後 |
59.25 |
58.27 |
58.22 |
58.39 |
59.37 |
59.49 |
59.73 |
59.08 |
59.20 |
58.44 |
57.54 |
58.82 |
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5 |
微蝕前 |
63.40 |
63.71 |
64.90 |
64.65 |
64.52 |
64.02 |
63.13 |
64.84 |
63.40 |
63.77 |
63.65 |
64.00 |
4.96 |
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微蝕後 |
58.27 |
58.85 |
58.90 |
57.99 |
59.25 |
59.67 |
59.25 |
59.37 |
60.21 |
58.33 |
59.31 |
59.04 |
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6 |
微蝕前 |
64.08 |
64.65 |
64.65 |
65.42 |
64.14 |
64.52 |
64.46 |
64.27 |
65.42 |
64.08 |
64.27 |
64.54 |
4.86 |
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微蝕後 |
58.62 |
59.55 |
59.67 |
60.21 |
60.33 |
59.37 |
59.91 |
59.56 |
60.03 |
59.67 |
59.55 |
59.68 |
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7 |
微蝕前 |
63.46 |
64.52 |
65.03 |
64.14 |
65.22 |
64.20 |
64.52 |
64.97 |
64.39 |
64.77 |
64.52 |
64.52 |
5.84 |
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微蝕後 |
58.43 |
58.73 |
58.79 |
58.79 |
58.05 |
58.73 |
59.14 |
59.08 |
59.14 |
57.43 |
59.14 |
58.68 |
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8 |
微蝕前 |
62.02 |
65.03 |
63.40 |
63.46 |
63.52 |
63.71 |
63.58 |
64.20 |
63.89 |
64.58 |
63.27 |
63.70 |
5.67 |
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微蝕後 |
58.16 |
57.21 |
57.43 |
57.60 |
57.60 |
58.14 |
57.38 |
58.96 |
59.02 |
59.08 |
57.71 |
58.03 |
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9 |
微蝕前 |
61.76 |
63.65 |
63.27 |
60.70 |
61.51 |
62.02 |
63.40 |
62.80 |
62.67 |
62.93 |
61.20 |
62.36 |
5.35 |
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微蝕後 |
56.72 |
58.85 |
57.16 |
56.62 |
57.04 |
56.25 |
56.51 |
57.27 |
57.16 |
56.45 |
56.99 |
57.00 |
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Bottom Side |
1 |
2 |
3 |
4 |
5 |
6 |
7 |
8 |
9 |
10 |
11 |
Avg |
Amount |
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1 |
微蝕前 |
64.77 |
65.09 |
64.39 |
64.27 |
64.58 |
64.20 |
64.08 |
64.52 |
65.22 |
65.68 |
62.57 |
64.49 |
5.21 |
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微蝕後 |
59.37 |
58.90 |
60.27 |
59.55 |
59.15 |
60.15 |
58.90 |
58.79 |
59.31 |
60.03 |
57.60 |
59.27 |
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2 |
微蝕前 |
63.89 |
65.29 |
65.42 |
64.52 |
65.61 |
63.95 |
64.33 |
64.27 |
65.29 |
64.52 |
65.16 |
64.75 |
5.33 |
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微蝕後 |
58.56 |
59.73 |
59.37 |
60.39 |
59.73 |
59.55 |
59.51 |
59.37 |
59.25 |
59.67 |
58.50 |
59.42 |
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3 |
微蝕前 |
64.46 |
64.84 |
65.16 |
65.55 |
64.77 |
64.27 |
63.71 |
64.84 |
64.14 |
64.39 |
65.48 |
64.69 |
5.02 |
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微蝕後 |
58.67 |
59.61 |
61.01 |
59.97 |
59.55 |
59.25 |
58.01 |
60.21 |
60.01 |
60.45 |
59.61 |
59.67 |
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4 |
微蝕前 |
64.39 |
64.48 |
64.58 |
65.29 |
64.77 |
64.20 |
65.09 |
65.35 |
64.90 |
65.29 |
63.89 |
64.75 |
5.28 |
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微蝕後 |
58.85 |
59.67 |
59.79 |
60.33 |
59.79 |
59.49 |
60.01 |
59.51 |
59.51 |
59.25 |
57.97 |
59.47 |
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5 |
微蝕前 |
64.46 |
64.39 |
65.03 |
64.27 |
65.09 |
65.16 |
64.39 |
64.33 |
65.03 |
65.03 |
64.39 |
64.69 |
5.18 |
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微蝕後 |
57.99 |
59.85 |
60.07 |
60.33 |
60.27 |
58.90 |
59.79 |
59.37 |
59.97 |
59.61 |
58.39 |
59.50 |
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6 |
微蝕前 |
64.14 |
64.65 |
65.35 |
63.85 |
64.97 |
63.52 |
63.20 |
65.09 |
63.89 |
64.14 |
63.71 |
64.23 |
4.93 |
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微蝕後 |
59.14 |
59.91 |
59.31 |
59.61 |
59.61 |
58.90 |
59.25 |
58.73 |
58.56 |
59.73 |
59.49 |
59.29 |
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7 |
微蝕前 |
64.52 |
64.58 |
65.55 |
64.90 |
65.15 |
64.97 |
62.67 |
64.97 |
64.14 |
65.94 |
64.52 |
64.72 |
5.08 |
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微蝕後 |
57.82 |
59.08 |
60.15 |
60.21 |
59.37 |
60.21 |
59.31 |
60.03 |
59.67 |
60.03 |
60.15 |
59.64 |
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8 |
微蝕前 |
63.27 |
63.95 |
63.95 |
63.89 |
64.71 |
63.13 |
63.71 |
63.65 |
64.90 |
63.65 |
63.33 |
63.83 |
4.98 |
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微蝕後 |
58.27 |
58.62 |
58.62 |
59.31 |
59.31 |
58.17 |
59.37 |
59.08 |
59.49 |
58.56 |
58.56 |
58.85 |
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9 |
微蝕前 |
63.00 |
63.13 |
61.96 |
62.34 |
63.00 |
61.01 |
63.07 |
63.58 |
64.08 |
64.46 |
62.02 |
62.88 |
5.74 |
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微蝕後 |
56.35 |
57.38 |
56.19 |
55.35 |
56.56 |
58.22 |
58.50 |
56.94 |
57.60 |
58.90 |
56.51 |
57.14 |
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. |
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Max |
Min |
R |
S |
Average |
Uniformity |
Etch Amount (Avg) |
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Top Side |
微蝕前 |
65.81
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60.70
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5.11 |
1.02
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64.23
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3.98% |
5.46 |
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微蝕後 |
60.45
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56.25
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4.20 |
0.98
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58.76
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3.57% |
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Bottom Side |
微蝕前 |
65.94
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61.01
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4.93 |
0.89
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64.34
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3.83% |
5.20 |
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微蝕後 |
61.01
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55.35
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5.66 |
1.02
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59.14
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4.79% |
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