板編號#3
槽液濃度		H2SO4=167g/L				溫度32.7 / 32.7Degree C
		H2O2=57g/L				線速3.0m / min
		Cu=<40g/L
TOP Side		1	2	3	4	5	6	7	8	9	10	11	Avg	Amount
1	微蝕前	63.58	64.58	68.84	64.65	64.20	64.20	64.52	63.83	63.46	63.89	63.35	64.46	6.84
	微蝕後	56.14	57.71	57.27	57.99	58.27	57.54	58.10	57.77	58.18	57.43	57.43	57.62
2	微蝕前	63.65	64.71	64.90	63.89	64.27	64.08	64.77	65.22	64.58	65.35	64.71	64.56	6.24
	微蝕後	56.88	58.16	58.85	59.31	58.39	58.22	58.56	57.93	58.27	59.08	57.88	58.32
3	微蝕前	64.14	64.33	65.81	64.97	63.95	64.58	63.83	64.97	64.65	64.71	65.09	64.64	5.98
	微蝕後	56.94	58.85	58.39	58.62	57.77	59.73	59.61	58.90	59.14	59.25	58.10	58.66
4	微蝕前	64.08	64.20	64.71	65.29	64.65	64.58	64.97	64.20	64.27	64.52	64.46	64.54	6.40
	微蝕後	57.70	57.60	57.77	57.65	57.10	58.10	58.39	58.25	59.97	58.50	58.50	58.14
5	微蝕前	64.97	65.68	64.52	64.52	66.07	64.71	65.42	65.48	65.29	65.81	64.58	65.19	6.39
	微蝕後	58.22	58.39	59.20	59.55	58.85	58.96	59.02	58.05	59.20	58.79	58.56	58.80
6	微蝕前	64.39	65.22	64.65	64.90	64.39	64.20	64.46	65.68	64.77	65.48	63.77	64.72	5.89
	微蝕後	58.33	58.44	58.85	58.56	59.02	59.31	59.02	59.14	59.21	59.30	57.93	58.83
7	微蝕前	63.33	64.52	64.84	64.16	64.20	63.07	63.71	64.46	65.22	65.35	64.90	64.34	5.64
	微蝕後	58.33	58.85	59.08	59.25	59.01	58.08	58.21	58.70	59.08	59.21	57.91	58.70
8	微蝕前	63.71	64.27	64.02	65.55	64.08	65.35	65.03	65.22	64.94	64.84	63.71	64.61	6.19
	微蝕後	58.05	58.73	58.02	57.71	58.21	58.02	59.22	58.96	58.50	59.67	57.50	58.42
9	微蝕前	63.33	64.33	62.67	63.52	64.27	64.48	64.08	64.27	63.77	64.58	62.21	63.77	6.16
	微蝕後	56.51	58.79	58.39	57.71	55.72	57.49	57.99	57.77	58.39	58.32	56.72	57.62
Bottom Side		1	2	3	4	5	6	7	8	9	10	11	Avg	Amount
1	微蝕前	61.96	62.67	63.40	63.27	63.52	62.93	65.03	63.27	63.89	63.33	63.71	63.36	6.06
	微蝕後	55.20	57.28	58.04	56.99	57.49	57.32	57.93	57.16	57.21	57.91	57.82	57.30
2	微蝕前	63.52	64.14	65.48	64.90	64.20	64.97	65.48	65.22	64.14	64.90	63.71	64.61	6.60
	微蝕後	57.60	57.82	58.73	58.27	58.04	58.38	58.56	58.16	57.36	57.93	57.16	58.00
3	微蝕前	64.77	65.61	65.22	65.94	64.39	64.52	63.46	64.33	64.97	64.65	64.39	64.75	6.95
	微蝕後	57.49	58.10	58.27	57.32	57.10	58.03	58.22	57.38	58.25	58.20	57.49	57.80
4	微蝕前	63.52	64.33	64.08	64.77	65.09	65.03	63.89	64.71	64.71	64.84	64.08	64.46	6.34
	微蝕後	56.94	57.99	58.03	58.05	59.08	58.72	58.44	58.10	58.22	57.82	57.93	58.12
5	微蝕前	63.00	64.02	64.77	63.95	64.71	63.71	63.65	63.83	64.90	64.08	64.20	64.07	5.94
	微蝕後	57.88	58.20	58.72	57.92	58.90	57.49	57.71	58.05	58.56	58.27	57.82	58.14
6	微蝕前	64.02	64.08	65.48	64.33	63.52	63.40	64.77	64.20	63.58	62.60	64.33	64.03	6.19
	微蝕後	58.05	57.93	58.16	58.96	58.33	57.20	58.33	58.33	56.99	56.83	57.10	57.84
7	微蝕前	62.54	64.58	65.03	64.27	64.58	62.93	64.84	63.95	64.77	63.95	64.71	64.20	6.47
	微蝕後	56.14	57.54	58.37	58.04	58.62	56.20	59.08	57.60	58.50	57.12	57.82	57.73
8	微蝕前	64.46	64.71	64.58	63.83	64.46	64.58	65.74	64.90	64.84	64.39	64.33	64.62	6.22
	微蝕後	57.38	57.88	58.25	57.14	58.10	59.31	59.31	59.25	58.56	59.67	57.60	58.40
9	微蝕前	61.76	64.77	63.00	62.87	64.08	64.08	63.40	63.95	63.71	63.20	62.21	63.37	6.43
	微蝕後	56.03	57.49	56.94	58.73	56.14	57.27	55.20	57.93	56.29	57.27	57.05	56.94
			Max	Min	R	S	Average	Uniformity		Etch Amount (Avg)
	Top Side	微蝕前	68.84	62.21	6.63	0.81	64.54	5.14%		6.19
		微蝕後	59.97	55.72	4.25	0.78	58.35	3.64%
	Bottom Side	微蝕前	65.94	61.76	4.18	0.83	64.16	3.26%		6.35
		微蝕後	59.67	55.20	4.47	0.81	57.81	3.87%