板編號#3
槽液濃度		H2SO4=167g/L				溫度32.7 / 32.7Degree C
		H2O2=57g/L				線速2.5m / min
		Cu=<40g/L
TOP Side		1	2	3	4	5	6	7	8	9	10	11	Avg	Amount
1	微蝕前	65.09	64.52	64.46	63.71	64.46	63.89	64.46	65.55	64.20	64.39	63.00	64.34	7.17
	微蝕後	56.35	57.05	56.45	57.32	57.05	56.78	57.32	57.65	56.14	57.77	59.02	57.17
2	微蝕前	63.46	64.52	64.90	65.55	64.97	65.03	65.16	65.09	65.03	64.39	63.77	64.72	7.60
	微蝕後	57.05	56.99	56.51	57.65	57.65	56.83	57.77	57.10	57.49	56.94	56.24	57.11
3	微蝕前	65.29	64.77	64.77	64.27	64.27	64.90	64.33	64.27	62.93	63.71	63.33	64.26	7.08
	微蝕後	56.99	57.10	57.65	57.71	56.99	56.45	57.93	57.21	57.21	56.83	56.94	57.18
4	微蝕前	64.33	65.35	64.52	64.08	63.77	65.16	65.29	64.84	65.03	65.22	63.13	64.61	7.82
	微蝕後	56.51	57.05	56.88	57.05	56.51	56.29	56.62	57.38	56.94	57.32	56.14	56.79
5	微蝕前	64.08	63.52	65.22	64.77	65.42	64.52	64.20	65.16	64.58	64.90	64.52	64.63	8.16
	微蝕後	56.29	56.72	55.82	56.35	57.65	56.35	56.14	55.82	56.72	56.78	56.51	56.47
6	微蝕前	63.65	65.58	64.65	64.39	64.58	63.52	65.03	64.84	64.90	64.84	63.13	64.46	7.94
	微蝕後	55.93	57.65	56.99	56.72	56.78	56.03	56.78	57.32	56.29	56.56	54.69	56.52
7	微蝕前	64.58	65.35	64.33	64.20	65.03	64.39	64.65	65.03	65.29	65.03	64.27	64.74	7.97
	微蝕後	56.88	56.78	56.45	56.88	56.29	56.78	57.71	56.72	57.05	56.72	56.19	56.77
8	微蝕前	63.13	63.89	63.46	64.84	64.27	63.65	63.65	64.65	65.22	63.40	64.02	64.02	7.98
	微蝕後	55.93	56.19	56.51	56.83	55.98	56.24	55.77	55.20	56.19	56.29	55.25	56.03
9	微蝕前	62.08	63.27	62.10	62.41	62.21	62.21	63.65	62.67	63.07	62.37	63.65	62.70	7.16
	微蝕後	55.20	55.15	55.98	55.30	56.40	55.20	56.03	55.72	56.51	54.50	54.95	55.54
Bottom Side		1	2	3	4	5	6	7	8	9	10	11	Avg	Amount
1	微蝕前	64.14	65.09	64.33	65.29	63.65	64.97	65.09	65.03	62.67	63.71	64.08	64.37	6.74
	微蝕後	57.60	57.71	57.43	57.88	57.16	56.99	57.82	58.22	56.83	57.82	58.44	57.63
2	微蝕前	64.84	65.29	64.90	64.33	64.29	64.02	65.09	65.16	64.84	64.65	64.14	64.69	7.20
	微蝕後	56.56	56.78	57.16	57.82	58.33	57.71	57.49	58.16	58.27	57.16	56.94	57.49
3	微蝕前	63.40	63.89	64.20	65.68	63.40	64.27	64.14	65.03	65.48	63.20	63.00	64.15	6.65
	微蝕後	56.72	57.49	57.21	57.71	57.65	58.10	57.38	58.67	57.38	57.27	56.94	57.50
4	微蝕前	64.65	65.22	65.48	63.40	65.81	64.29	64.29	63.71	65.68	64.20	63.95	64.61	7.12
	微蝕後	56.14	58.10	57.21	57.27	58.56	57.21	57.32	57.99	57.49	58.16	56.94	57.49
5	微蝕前	62.93	64.77	64.77	64.27	64.71	64.65	65.88	63.65	64.46	63.52	64.27	64.35	7.31
	微蝕後	56.78	57.38	56.51	56.94	56.83	57.27	58.90	57.60	56.40	56.40	56.51	57.05
6	微蝕前	62.93	63.89	63.89	64.33	64.14	64.84	64.02	64.14	65.42	64.58	64.90	64.28	6.83
	微蝕後	56.29	57.54	57.10	58.27	58.90	57.38	57.77	58.22	57.43	57.49	55.56	57.45
7	微蝕前	65.16	64.27	64.77	64.97	64.46	64.71	65.22	64.20	65.68	65.29	64.46	64.84	7.25
	微蝕後	56.83	57.32	57.49	57.32	57.38	58.10	58.16	57.60	57.60	58.16	57.43	57.58
8	微蝕前	63.40	64.08	64.02	64.33	64.77	63.46	63.71	63.71	64.08	63.58	63.77	63.90	7.86
	微蝕後	55.93	56.03	55.30	56.03	56.03	56.78	56.56	56.88	55.77	55.87	55.30	56.04
9	微蝕前	61.45	63.46	61.89	61.07	62.67	61.83	63.20	63.71	64.52	63.00	61.96	62.61	7.82
	微蝕後	54.59	54.59	54.64	52.81	53.71	55.87	55.15	55.05	55.93	55.87	54.54	54.80
			Max	Min	R	S	Average	Uniformity		Etch Amount (Avg)
	Top Side	微蝕前	65.58	62.08	3.50	0.86	64.27	2.72%		7.65
		微蝕後	59.02	54.50	4.52	0.76	56.62	3.99%
	Bottom Side	微蝕前	65.88	61.07	4.81	0.94	64.20	3.75%		7.20
		微蝕後	58.90	52.81	6.09	1.12	57.00	5.34%