板編號#3
槽液濃度		H2SO4=167g/L				溫度32.7 / 32.7Degree C
		H2O2=57g/L				線速2.0m / min
		Cu=<40g/L
TOP Side		1	2	3	4	5	6	7	8	9	10	11	Avg	Amount
1	微蝕前	63.83	64.08	65.03	64.71	64.58	63.95	64.39	64.39	63.95	64.84	63.52	64.30	8.73
	微蝕後	54.30	54.75	55.46	56.19	55.30	55.15	54.20	55.10	56.45	55.77	58.56	55.57
2	微蝕前	63.77	63.65	64.08	64.27	64.08	63.58	62.27	64.71	64.58	65.42	63.65	64.01	8.76
	微蝕後	54.25	55.25	55.20	56.69	55.15	55.15	55.25	55.56	54.95	54.95	55.30	55.25
3	微蝕前	64.20	65.74	64.46	64.84	64.90	64.08	64.52	64.71	64.02	64.71	63.71	64.54	8.77
	微蝕後	54.75	64.50	53.86	54.90	55.20	54.80	55.30	55.72	54.25	55.10	55.05	55.77
4	微蝕前	64.39	65.35	66.21	63.58	65.22	64.65	65.03	64.33	65.29	64.97	65.16	64.93	10.00
	微蝕後	53.90	54.45	54.50	54.80	55.66	55.10	54.80	55.00	55.66	55.15	55.20	54.93
5	微蝕前	63.95	65.88	65.61	63.71	64.14	64.27	65.03	65.35	65.09	64.71	64.84	64.78	10.17
	微蝕後	54.25	54.90	54.64	54.80	55.35	54.25	54.20	55.66	54.75	54.00	53.90	54.61
6	微蝕前	63.95	64.58	64.14	64.29	62.27	63.95	65.55	64.77	64.52	64.52	64.20	64.25	9.62
	微蝕後	53.28	55.00	54.59	54.20	54.85	54.35	55.10	55.46	55.61	54.90	53.61	54.63
7	微蝕前	64.02	64.65	65.29	64.58	64.46	64.46	64.97	65.22	65.29	64.46	64.77	64.74	9.84
	微蝕後	54.40	54.15	55.56	55.35	54.30	54.90	54.35	55.77	55.00	55.87	54.25	54.90
8	微蝕前	63.65	62.80	64.46	64.77	65.03	64.84	63.20	63.83	63.40	63.40	64.38	63.98	9.96
	微蝕後	53.47	54.45	54.30	54.35	53.56	53.86	54.50	54.80	54.20	53.42	53.33	54.02
9	微蝕前	61.38	63.77	64.45	63.33	62.08	62.28	62.87	62.93	63.77	61.96	63.20	62.91	9.06
	微蝕後	53.28	54.05	53.47	53.95	53.42	54.20	54.45	53.71	54.59	54.20	52.99	53.85
Bottom Side		1	2	3	4	5	6	7	8	9	10	11	Avg	Amount
1	微蝕前	63.83	63.07	64.77	64.02	63.27	63.46	65.22	63.71	63.89	64.14	63.33	63.88	8.70
	微蝕後	54.59	54.80	55.35	55.15	56.14	55.10	55.05	55.41	55.15	54.59	55.66	55.18
2	微蝕前	64.52	64.97	65.16	65.48	66.88	64.20	64.97	64.84	66.21	65.09	63.52	65.08	10.03
	微蝕後	54.69	55.05	55.66	55.15	55.05	56.29	55.05	54.05	54.54	55.20	54.80	55.05
3	微蝕前	63.58	64.58	64.84	64.97	64.65	64.14	64.77	64.52	64.02	64.71	63.83	64.42	9.13
	微蝕後	55.30	55.41	56.19	55.15	55.98	56.14	54.95	55.30	55.10	55.00	53.66	55.29
4	微蝕前	63.07	64.02	64.39	65.61	63.89	64.33	65.88	63.95	64.90	64.71	64.08	64.44	9.40
	微蝕後	53.76	55.35	55.66	54.90	54.40	54.90	55.05	56.29	55.87	54.75	54.45	55.03
5	微蝕前	62.74	62.08	64.65	64.84	63.13	64.46	65.03	64.33	63.77	63.27	63.58	63.81	8.99
	微蝕後	54.05	54.35	54.64	55.20	54.54	55.25	55.46	55.15	55.10	54.95	54.30	54.82
6	微蝕前	65.29	64.65	64.77	64.71	64.65	65.55	63.13	64.97	64.65	64.77	63.40	64.59	9.57
	微蝕後	53.90	55.15	55.10	55.61	56.03	55.15	55.20	55.05	54.80	55.54	53.71	55.02
7	微蝕前	64.58	63.13	65.42	65.22	65.03	64.97	64.71	63.77	64.97	64.52	62.41	64.43	9.23
	微蝕後	54.35	54.54	55.10	56.45	55.30	56.14	54.95	55.20	55.56	55.46	54.15	55.20
8	微蝕前	64.02	64.02	63.89	63.52	63.00	62.41	63.77	64.20	64.46	64.39	63.77	63.77	9.82
	微蝕後	53.23	54.54	54.64	54.15	53.52	54.05	54.59	54.00	54.64	53.28	52.76	53.95
9	微蝕前	63.52	64.20	62.93	62.60	61.45	63.33	63.46	61.96	62.54	63.83	61.57	62.85	10.83
	微蝕後	51.48	52.11	53.23	51.75	50.87	51.71	52.09	51.89	52.85	52.85	51.39	52.02
			Max	Min	R	S	Average	Uniformity		Etch Amount (Avg)
	Top Side	微蝕前	66.21	61.38	4.83	0.88	64.27	3.76%		9.43
		微蝕後	64.50	52.99	11.51	1.28	54.84	10.50%
	Bottom Side	微蝕前	66.88	61.45	5.43	0.97	64.14	4.23%		9.52
		微蝕後	56.45	50.87	5.58	1.17	54.62	5.11%