板編號#3
槽液濃度		H2SO4=167g/L				溫度32.7 / 32.7Degree C
		H2O2=57g/L				線速1.5m / min
		Cu=<40g/L
TOP Side		1	2	3	4	5	6	7	8	9	10	11	Avg	Amount
1	微蝕前	62.21	63.65	64.27	64.14	64.90	63.89	63.58	64.90	64.02	64.14	62.54	63.84	12.38
	微蝕後	50.61	51.75	51.57	51.57	51.22	50.74	51.39	51.80	51.22	52.02	52.16	51.46
2	微蝕前	64.65	65.68	64.90	64.65	65.55	66.14	65.81	64.65	64.33	64.14	63.20	64.88	13.66
	微蝕後	50.74	50.87	51.04	52.02	51.48	51.44	50.52	50.87	51.57	51.71	51.22	51.23
3	微蝕前	64.58	65.94	64.20	65.35	64.52	65.03	64.46	64.58	65.81	65.74	64.77	65.00	13.19
	微蝕後	51.48	51.44	52.02	51.84	52.25	51.84	51.57	52.11	51.93	52.02	51.39	51.81
4	微蝕前	64.39	65.04	65.42	65.09	65.55	64.58	64.20	65.22	64.90	64.14	64.65	64.83	13.25
	微蝕後	51.35	52.02	51.84	51.93	52.16	51.80	51.26	50.65	51.84	51.35	51.26	51.59
5	微蝕前	65.68	65.16	64.39	64.77	63.77	65.16	65.68	65.42	66.41	65.35	63.52	65.03	12.91
	微蝕後	51.93	50.91	51.26	51.57	51.89	52.25	57.98	51.26	51.71	51.22	51.35	52.12
6	微蝕前	65.03	64.77	64.29	65.81	64.97	64.58	63.71	65.55	64.74	65.09	64.90	64.86	13.44
	微蝕後	51.26	51.08	52.02	51.39	51.22	51.30	51.66	51.22	51.84	51.08	51.57	51.42
7	微蝕前	64.97	65.88	64.02	63.55	63.71	64.20	65.16	64.52	65.09	63.77	63.65	64.41	12.87
	微蝕後	51.17	51.08	51.75	51.26	51.71	51.98	51.80	51.93	51.93	51.57	50.82	51.55
8	微蝕前	63.65	64.39	65.16	64.97	63.40	65.81	65.22	65.16	65.35	65.42	63.95	64.77	13.02
	微蝕後	51.26	51.44	51.84	51.66	52.67	52.20	51.48	51.26	52.34	51.39	51.75	51.75
9	微蝕前	65.94	63.77	63.33	62.60	64.52	62.54	65.09	64.77	64.52	64.33	63.65	64.10	12.79
	微蝕後	50.82	51.44	50.01	50.44	51.35	52.16	51.75	51.98	51.66	51.22	51.53	51.31
Bottom Side		1	2	3	4	5	6	7	8	9	10	11	Avg	Amount
1	微蝕前	63.52	62.87	63.33	63.83	65.03	63.40	64.02	64.46	64.71	63.31	63.13	63.78	12.48
	微蝕後	50.95	51.17	51.98	50.91	52.25	51.22	51.44	51.44	51.71	50.52	50.78	51.31
2	微蝕前	63.40	64.02	64.46	64.71	63.13	62.41	65.35	64.14	64.20	64.14	62.74	63.88	12.32
	微蝕後	51.08	51.44	51.44	52.76	51.53	52.02	51.39	51.35	51.93	51.48	50.74	51.56
3	微蝕前	63.52	64.90	65.22	64.33	65.42	64.90	64.20	65.03	64.90	64.84	64.33	64.69	12.29
	微蝕後	51.80	52.95	52.85	52.30	52.57	51.00	52.57	52.85	52.43	52.67	52.43	52.40
4	微蝕前	64.33	64.39	63.77	65.09	64.65	65.35	65.29	64.07	65.48	64.77	65.55	64.79	12.78
	微蝕後	50.65	52.81	51.57	52.71	52.25	51.71	52.43	52.39	51.57	52.30	51.80	52.02
5	微蝕前	63.95	63.13	64.65	65.48	63.45	63.83	64.02	64.77	63.71	64.20	64.97	64.20	12.30
	微蝕後	50.78	51.98	52.76	51.71	52.62	52.07	51.98	51.62	51.80	51.62	51.93	51.90
6	微蝕前	63.89	64.40	64.20	64.97	63.00	65.29	65.09	64.52	64.65	64.33	63.89	64.38	12.77
	微蝕後	50.14	51.66	52.07	51.84	51.39	51.53	52.34	51.57	52.81	51.89	50.52	51.61
7	微蝕前	63.52	64.20	64.58	64.71	64.71	64.97	64.02	64.46	63.89	64.84	63.65	64.32	12.71
	微蝕後	50.52	51.48	51.75	52.53	52.34	51.62	51.57	52.34	51.48	50.87	51.22	51.61
8	微蝕前	63.46	64.71	65.29	65.09	65.09	65.61	65.48	65.48	65.68	64.77	65.07	65.07	13.08
	微蝕後	51.39	51.93	52.57	52.25	51.35	52.11	52.39	52.76	51.75	52.07	51.26	51.98
9	微蝕前	61.38	64.14	60.95	61.89	63.50	62.28	63.13	61.32	61.38	62.47	62.93	62.31	12.42
	微蝕後	49.64	51.13	49.14	46.93	47.69	51.17	50.52	50.10	52.02	50.65	49.72	49.88
			Max	Min	R	S	Average	Uniformity		Etch Amount (Avg)
	Top Side	微蝕前	66.41	62.21	4.20	0.84	64.64	3.25%		13.05
		微蝕後	57.98	50.01	7.97	0.80	51.58	7.73%
	Bottom Side	微蝕前	65.68	60.95	4.73	1.02	64.16	3.69%		12.57
		微蝕後	52.95	46.93	6.02	0.99	51.59	5.83%