板編號#3
槽液濃度 H2SO4=167g/L 溫度32.7 / 32.7Degree C
H2O2=57g/L 線速1.5m / min
Cu=<40g/L
TOP Side 1 2 3 4 5 6 7 8 9 10 11 Avg Amount
1 微蝕前 62.21 63.65 64.27 64.14 64.90 63.89 63.58 64.90 64.02 64.14 62.54 63.84 12.38
微蝕後 50.61 51.75 51.57 51.57 51.22 50.74 51.39 51.80 51.22 52.02 52.16 51.46
2 微蝕前 64.65 65.68 64.90 64.65 65.55 66.14 65.81 64.65 64.33 64.14 63.20 64.88 13.66
微蝕後 50.74 50.87 51.04 52.02 51.48 51.44 50.52 50.87 51.57 51.71 51.22 51.23
3 微蝕前 64.58 65.94 64.20 65.35 64.52 65.03 64.46 64.58 65.81 65.74 64.77 65.00 13.19
微蝕後 51.48 51.44 52.02 51.84 52.25 51.84 51.57 52.11 51.93 52.02 51.39 51.81
4 微蝕前 64.39 65.04 65.42 65.09 65.55 64.58 64.20 65.22 64.90 64.14 64.65 64.83 13.25
微蝕後 51.35 52.02 51.84 51.93 52.16 51.80 51.26 50.65 51.84 51.35 51.26 51.59
5 微蝕前 65.68 65.16 64.39 64.77 63.77 65.16 65.68 65.42 66.41 65.35 63.52 65.03 12.91
微蝕後 51.93 50.91 51.26 51.57 51.89 52.25 57.98 51.26 51.71 51.22 51.35 52.12
6 微蝕前 65.03 64.77 64.29 65.81 64.97 64.58 63.71 65.55 64.74 65.09 64.90 64.86 13.44
微蝕後 51.26 51.08 52.02 51.39 51.22 51.30 51.66 51.22 51.84 51.08 51.57 51.42
7 微蝕前 64.97 65.88 64.02 63.55 63.71 64.20 65.16 64.52 65.09 63.77 63.65 64.41 12.87  
微蝕後 51.17 51.08 51.75 51.26 51.71 51.98 51.80 51.93 51.93 51.57 50.82 51.55
8 微蝕前 63.65 64.39 65.16 64.97 63.40 65.81 65.22 65.16 65.35 65.42 63.95 64.77 13.02
微蝕後 51.26 51.44 51.84 51.66 52.67 52.20 51.48 51.26 52.34 51.39 51.75 51.75
9 微蝕前 65.94 63.77 63.33 62.60 64.52 62.54 65.09 64.77 64.52 64.33 63.65 64.10 12.79
微蝕後 50.82 51.44 50.01 50.44 51.35 52.16 51.75 51.98 51.66 51.22 51.53 51.31
Bottom Side 1 2 3 4 5 6 7 8 9 10 11 Avg  Amount
1 微蝕前 63.52 62.87 63.33 63.83 65.03 63.40 64.02 64.46 64.71 63.31 63.13 63.78 12.48
微蝕後 50.95 51.17 51.98 50.91 52.25 51.22 51.44 51.44 51.71 50.52 50.78 51.31
2 微蝕前 63.40 64.02 64.46 64.71 63.13 62.41 65.35 64.14 64.20 64.14 62.74 63.88 12.32
微蝕後 51.08 51.44 51.44 52.76 51.53 52.02 51.39 51.35 51.93 51.48 50.74 51.56
3 微蝕前 63.52 64.90 65.22 64.33 65.42 64.90 64.20 65.03 64.90 64.84 64.33 64.69 12.29
微蝕後 51.80 52.95 52.85 52.30 52.57 51.00 52.57 52.85 52.43 52.67 52.43 52.40
4 微蝕前 64.33 64.39 63.77 65.09 64.65 65.35 65.29 64.07 65.48 64.77 65.55 64.79 12.78
微蝕後 50.65 52.81 51.57 52.71 52.25 51.71 52.43 52.39 51.57 52.30 51.80 52.02
5 微蝕前 63.95 63.13 64.65 65.48 63.45 63.83 64.02 64.77 63.71 64.20 64.97 64.20 12.30
微蝕後 50.78 51.98 52.76 51.71 52.62 52.07 51.98 51.62 51.80 51.62 51.93 51.90
6 微蝕前 63.89 64.40 64.20 64.97 63.00 65.29 65.09 64.52 64.65 64.33 63.89 64.38 12.77
微蝕後 50.14 51.66 52.07 51.84 51.39 51.53 52.34 51.57 52.81 51.89 50.52 51.61
7 微蝕前 63.52 64.20 64.58 64.71 64.71 64.97 64.02 64.46 63.89 64.84 63.65 64.32 12.71
微蝕後 50.52 51.48 51.75 52.53 52.34 51.62 51.57 52.34 51.48 50.87 51.22 51.61
8 微蝕前 63.46 64.71 65.29 65.09 65.09 65.61 65.48 65.48 65.68 64.77 65.07 65.07 13.08
微蝕後 51.39 51.93 52.57 52.25 51.35 52.11 52.39 52.76 51.75 52.07 51.26 51.98
9 微蝕前 61.38 64.14 60.95 61.89 63.50 62.28 63.13 61.32 61.38 62.47 62.93 62.31 12.42
微蝕後 49.64 51.13 49.14 46.93 47.69 51.17 50.52 50.10 52.02 50.65 49.72 49.88
  Max Min R S Average Uniformity Etch Amount (Avg)
Top Side 微蝕前 66.41 62.21 4.20 0.84 64.64 3.25% 13.05
微蝕後 57.98 50.01 7.97 0.80 51.58 7.73%
Bottom Side 微蝕前 65.68 60.95 4.73 1.02 64.16 3.69% 12.57
微蝕後 52.95 46.93 6.02 0.99 51.59 5.83%