板編號#3 |
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槽液濃度 |
H2SO4=167g/L |
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溫度32.7 / 32.7Degree C |
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H2O2=57g/L |
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線速1.5m / min |
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Cu=<40g/L |
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TOP Side |
1 |
2 |
3 |
4 |
5 |
6 |
7 |
8 |
9 |
10 |
11 |
Avg |
Amount |
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1 |
微蝕前 |
62.21 |
63.65 |
64.27 |
64.14 |
64.90 |
63.89 |
63.58 |
64.90 |
64.02 |
64.14 |
62.54 |
63.84 |
12.38 |
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微蝕後 |
50.61 |
51.75 |
51.57 |
51.57 |
51.22 |
50.74 |
51.39 |
51.80 |
51.22 |
52.02 |
52.16 |
51.46 |
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2 |
微蝕前 |
64.65 |
65.68 |
64.90 |
64.65 |
65.55 |
66.14 |
65.81 |
64.65 |
64.33 |
64.14 |
63.20 |
64.88 |
13.66 |
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微蝕後 |
50.74 |
50.87 |
51.04 |
52.02 |
51.48 |
51.44 |
50.52 |
50.87 |
51.57 |
51.71 |
51.22 |
51.23 |
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3 |
微蝕前 |
64.58 |
65.94 |
64.20 |
65.35 |
64.52 |
65.03 |
64.46 |
64.58 |
65.81 |
65.74 |
64.77 |
65.00 |
13.19 |
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微蝕後 |
51.48 |
51.44 |
52.02 |
51.84 |
52.25 |
51.84 |
51.57 |
52.11 |
51.93 |
52.02 |
51.39 |
51.81 |
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4 |
微蝕前 |
64.39 |
65.04 |
65.42 |
65.09 |
65.55 |
64.58 |
64.20 |
65.22 |
64.90 |
64.14 |
64.65 |
64.83 |
13.25 |
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微蝕後 |
51.35 |
52.02 |
51.84 |
51.93 |
52.16 |
51.80 |
51.26 |
50.65 |
51.84 |
51.35 |
51.26 |
51.59 |
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5 |
微蝕前 |
65.68 |
65.16 |
64.39 |
64.77 |
63.77 |
65.16 |
65.68 |
65.42 |
66.41 |
65.35 |
63.52 |
65.03 |
12.91 |
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微蝕後 |
51.93 |
50.91 |
51.26 |
51.57 |
51.89 |
52.25 |
57.98 |
51.26 |
51.71 |
51.22 |
51.35 |
52.12 |
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6 |
微蝕前 |
65.03 |
64.77 |
64.29 |
65.81 |
64.97 |
64.58 |
63.71 |
65.55 |
64.74 |
65.09 |
64.90 |
64.86 |
13.44 |
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微蝕後 |
51.26 |
51.08 |
52.02 |
51.39 |
51.22 |
51.30 |
51.66 |
51.22 |
51.84 |
51.08 |
51.57 |
51.42 |
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7 |
微蝕前 |
64.97 |
65.88 |
64.02 |
63.55 |
63.71 |
64.20 |
65.16 |
64.52 |
65.09 |
63.77 |
63.65 |
64.41 |
12.87 |
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微蝕後 |
51.17 |
51.08 |
51.75 |
51.26 |
51.71 |
51.98 |
51.80 |
51.93 |
51.93 |
51.57 |
50.82 |
51.55 |
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8 |
微蝕前 |
63.65 |
64.39 |
65.16 |
64.97 |
63.40 |
65.81 |
65.22 |
65.16 |
65.35 |
65.42 |
63.95 |
64.77 |
13.02 |
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微蝕後 |
51.26 |
51.44 |
51.84 |
51.66 |
52.67 |
52.20 |
51.48 |
51.26 |
52.34 |
51.39 |
51.75 |
51.75 |
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9 |
微蝕前 |
65.94 |
63.77 |
63.33 |
62.60 |
64.52 |
62.54 |
65.09 |
64.77 |
64.52 |
64.33 |
63.65 |
64.10 |
12.79 |
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微蝕後 |
50.82 |
51.44 |
50.01 |
50.44 |
51.35 |
52.16 |
51.75 |
51.98 |
51.66 |
51.22 |
51.53 |
51.31 |
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Bottom Side |
1 |
2 |
3 |
4 |
5 |
6 |
7 |
8 |
9 |
10 |
11 |
Avg |
Amount |
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1 |
微蝕前 |
63.52 |
62.87 |
63.33 |
63.83 |
65.03 |
63.40 |
64.02 |
64.46 |
64.71 |
63.31 |
63.13 |
63.78 |
12.48 |
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微蝕後 |
50.95 |
51.17 |
51.98 |
50.91 |
52.25 |
51.22 |
51.44 |
51.44 |
51.71 |
50.52 |
50.78 |
51.31 |
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2 |
微蝕前 |
63.40 |
64.02 |
64.46 |
64.71 |
63.13 |
62.41 |
65.35 |
64.14 |
64.20 |
64.14 |
62.74 |
63.88 |
12.32 |
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微蝕後 |
51.08 |
51.44 |
51.44 |
52.76 |
51.53 |
52.02 |
51.39 |
51.35 |
51.93 |
51.48 |
50.74 |
51.56 |
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3 |
微蝕前 |
63.52 |
64.90 |
65.22 |
64.33 |
65.42 |
64.90 |
64.20 |
65.03 |
64.90 |
64.84 |
64.33 |
64.69 |
12.29 |
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微蝕後 |
51.80 |
52.95 |
52.85 |
52.30 |
52.57 |
51.00 |
52.57 |
52.85 |
52.43 |
52.67 |
52.43 |
52.40 |
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4 |
微蝕前 |
64.33 |
64.39 |
63.77 |
65.09 |
64.65 |
65.35 |
65.29 |
64.07 |
65.48 |
64.77 |
65.55 |
64.79 |
12.78 |
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微蝕後 |
50.65 |
52.81 |
51.57 |
52.71 |
52.25 |
51.71 |
52.43 |
52.39 |
51.57 |
52.30 |
51.80 |
52.02 |
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5 |
微蝕前 |
63.95 |
63.13 |
64.65 |
65.48 |
63.45 |
63.83 |
64.02 |
64.77 |
63.71 |
64.20 |
64.97 |
64.20 |
12.30 |
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微蝕後 |
50.78 |
51.98 |
52.76 |
51.71 |
52.62 |
52.07 |
51.98 |
51.62 |
51.80 |
51.62 |
51.93 |
51.90 |
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6 |
微蝕前 |
63.89 |
64.40 |
64.20 |
64.97 |
63.00 |
65.29 |
65.09 |
64.52 |
64.65 |
64.33 |
63.89 |
64.38 |
12.77 |
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微蝕後 |
50.14 |
51.66 |
52.07 |
51.84 |
51.39 |
51.53 |
52.34 |
51.57 |
52.81 |
51.89 |
50.52 |
51.61 |
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7 |
微蝕前 |
63.52 |
64.20 |
64.58 |
64.71 |
64.71 |
64.97 |
64.02 |
64.46 |
63.89 |
64.84 |
63.65 |
64.32 |
12.71 |
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微蝕後 |
50.52 |
51.48 |
51.75 |
52.53 |
52.34 |
51.62 |
51.57 |
52.34 |
51.48 |
50.87 |
51.22 |
51.61 |
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8 |
微蝕前 |
63.46 |
64.71 |
65.29 |
65.09 |
65.09 |
65.61 |
65.48 |
65.48 |
65.68 |
64.77 |
65.07 |
65.07 |
13.08 |
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微蝕後 |
51.39 |
51.93 |
52.57 |
52.25 |
51.35 |
52.11 |
52.39 |
52.76 |
51.75 |
52.07 |
51.26 |
51.98 |
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9 |
微蝕前 |
61.38 |
64.14 |
60.95 |
61.89 |
63.50 |
62.28 |
63.13 |
61.32 |
61.38 |
62.47 |
62.93 |
62.31 |
12.42 |
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微蝕後 |
49.64 |
51.13 |
49.14 |
46.93 |
47.69 |
51.17 |
50.52 |
50.10 |
52.02 |
50.65 |
49.72 |
49.88 |
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Max |
Min |
R |
S |
Average |
Uniformity |
Etch Amount (Avg) |
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Top Side |
微蝕前 |
66.41
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62.21
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4.20 |
0.84
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64.64
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3.25% |
13.05 |
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微蝕後 |
57.98
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50.01
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7.97 |
0.80
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51.58
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7.73% |
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Bottom Side |
微蝕前 |
65.68
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60.95
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4.73 |
1.02
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64.16
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3.69% |
12.57 |
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微蝕後 |
52.95
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46.93
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6.02 |
0.99
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51.59
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5.83% |
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