板編號#3
槽液濃度		H2SO4=167g/L				溫度32.7 / 32.7Degree C
		H2O2=57g/L				線速1.0m / min
		Cu=<40g/L

TOP Side		1	2	3	4	5	6	7	8	9	10	11	Avg	Amount
1	微蝕前	62.93	62.80	63.77	63.58	63.27	62.67	62.74	63.52	63.27	63.83	63.07	63.22	18.08
1	微蝕後	44.31	45.39	44.88	45.05	44.77	44.94	44.94	45.22	45.39	45.74	45.99	45.15	18.08
2	微蝕前	62.60	62.34	64.58	63.40	64.27	63.20	64.84	63.58	63.65	63.83	63.33	63.60	19.45
2	微蝕後	44.31	43.59	44.34	43.72	44.74	44.34	44.14	43.62	43.95	44.67	44.24	44.15	19.45
3	微蝕前	62.74	64.58	64.33	64.77	64.46	64.71	64.84	64.52	63.77	64.14	64.02	64.26	19.55
3	微蝕後	44.04	44.24	45.11	44.24	45.11	45.05	45.85	44.77	44.91	44.44	44.04	44.71	19.55
4	微蝕前	63.83	64.97	64.33	64.97	64.52	63.71	63.95	64.20	64.77	64.33	64.27	64.35	19.56
4	微蝕後	43.88	44.34	44.81	44.41	44.91	45.05	45.29	44.77	44.67	45.29	45.22	44.79	19.56
5	微蝕前	64.27	64.88	64.71	64.08	64.52	63.65	64.58	64.97	64.20	64.20	64.14	64.38	19.50
5	微蝕後	44.67	43.98	44.81	44.61	45.32	44.44	45.60	44.71	45.18	44.71	45.67	44.88	19.50
6	微蝕前	63.40	64.65	63.95	64.02	64.14	64.14	65.09	64.71	64.97	63.77	63.40	64.20	19.62
6	微蝕後	44.04	44.27	44.77	44.14	45.29	44.57	45.43	44.91	44.34	44.51	44.11	44.58	19.62
7	微蝕前	64.71	63.46	64.20	64.71	64.33	63.77	63.83	64.92	64.33	64.84	64.33	64.31	19.53
7	微蝕後	44.11	44.54	44.64	44.71	44.98	44.71	45.71	45.08	44.74	44.31	45.08	44.78	19.53
8	微蝕前	62.87	63.77	63.95	63.77	63.07	64.27	64.02	63.46	64.86	64.23	63.07	63.76	19.09
8	微蝕後	44.94	43.65	44.64	44.84	45.36	45.01	45.60	44.64	44.47	44.04	44.21	44.67	19.09
9	微蝕前	62.80	62.60	62.87	63.00	61.96	63.52	64.65	62.93	64.33	64.46	61.64	63.16	18.97
9	微蝕後	43.85	45.08	43.85	42.74	43.53	45.11	45.05	42.96	44.88	45.46	43.59	44.19	18.97

Bottom Side		1	2	3	4	5	6	7	8	9	10	11	Avg	Amount
1	微蝕前	61.83	62.74	62.60	63.77	64.20	62.93	63.77	63.27	64.02	63.20	62.67	63.18	18.88
1	微蝕後	43.82	44.31	44.27	44.21	45.08	44.01	44.54	44.08	44.67	43.65	44.64	44.30	18.88
2	微蝕前	63.13	64.46	63.40	64.39	64.39	63.89	63.58	63.77	64.14	63.77	63.33	63.84	19.48
2	微蝕後	43.15	44.41	44.57	44.84	44.61	45.01	44.54	44.81	45.11	43.88	43.05	44.36	19.48
3	微蝕前	62.28	63.83	64.14	64.65	63.40	64.14	64.90	64.77	65.35	65.16	64.37	64.27	19.58
3	微蝕後	43.95	44.91	44.67	44.71	44.88	44.51	44.98	44.88	45.15	44.54	44.41	44.69	19.58
4	微蝕前	63.40	65.03	64.71	65.42	65.35	65.35	63.71	63.71	63.83	64.20	63.77	64.41	19.32
4	微蝕後	44.41	45.11	45.01	45.25	46.06	45.50	44.88	45.46	45.05	44.81	44.44	45.09	19.32
5	微蝕前	63.20	63.95	65.16	64.97	64.71	63.58	63.83	64.02	63.89	64.14	63.13	64.05	19.09
5	微蝕後	43.78	44.81	45.25	44.41	45.71	45.08	46.06	45.22	45.15	44.88	44.27	44.97	19.09
6	微蝕前	62.28	63.77	63.58	64.08	64.39	63.33	64.52	64.90	64.20	64.90	63.83	63.98	19.61
6	微蝕後	43.53	44.81	44.51	44.88	44.61	44.44	44.64	44.71	43.95	43.88	44.14	44.37	19.61
7	微蝕前	63.89	65.42	63.71	64.58	63.89	64.46	63.65	64.27	64.33	63.77	63.46	64.13	19.61
7	微蝕後	44.34	45.05	44.74	44.74	45.22	44.27	44.74	44.98	44.08	44.51	43.08	44.52	19.61
8	微蝕前	63.40	63.52	62.74	63.83	63.65	64.52	63.13	63.77	63.77	64.14	63.52	63.64	18.71
8	微蝕後	44.14	44.57	44.51	45.18	45.05	44.84	45.78	45.18	45.18	45.63	44.08	44.92	18.71
9	微蝕前	63.27	63.58	62.54	61.51	62.60	63.65	64.52	63.95	64.08	63.71	62.41	63.26	19.63
9	微蝕後	42.93	44.24	43.62	42.80	43.53	43.21	43.75	43.59	44.98	42.50	44.71	43.62	19.63

			Max	Min	R	S	Average	Uniformity		Etch Amount (Avg)
	Top Side	微蝕前	65.09	61.64	3.45	0.75	63.92	2.70%		19.26
	Top Side	微蝕後	45.99	42.74	3.25	0.61	44.66	3.64%		19.26
	Bottom Side	微蝕前	65.42	61.51	3.91	0.79	63.86	3.06%		19.32
	Bottom Side	微蝕後	46.06	42.50	3.56	0.69	44.54	4.00%		19.32