板編號#3
槽液濃度		H2SO4=167g/L				溫度29.00Degree C
		H2O2=57g/L				線速1.0m / min
		Cu=<40g/L
TOP Side		1	2	3	4	5	6	7	8	9	10	11	max	min	Avg	Amount
1	微蝕前	63.27	63.77	62.47	62.87	63.52	62.28	64.58	64.69	63.77	62.60	61.45	64.69	61.45	63.21	5.26
	微蝕後	57.16	57.54	58.39	57.38	58.16	58.73	57.82	57.93	58.44	57.88	57.99	58.73	57.16	57.95
2	微蝕前	62.60	62.28	61.70	61.96	63.27	63.00	63.52	62.67	63.00	63.27	63.58	63.58	61.70	62.80	3.95
	微蝕後	58.10	58.85	58.50	58.85	58.62	59.35	58.85	59.02	59.25	59.25	58.79	59.35	58.10	58.86
3	微蝕前	63.13	64.02	63.83	64.39	63.89	63.65	64.46	63.52	62.87	65.09	62.67	65.09	62.67	63.77	4.63
	微蝕後	58.73	58.63	58.90	59.55	59.67	59.37	59.08	59.49	59.55	59.55	58.10	59.67	58.10	59.15
4	微蝕前	64.52	64.39	64.52	64.65	64.39	63.58	64.65	64.14	65.42	65.35	63.40	65.42	63.40	64.46	5.52
	微蝕後	57.82	59.08	59.02	58.73	59.55	59.25	59.37	58.85	58.79	59.46	58.39	59.55	57.82	58.94
5	微蝕前	64.14	65.48	65.42	64.97	65.58	64.71	65.61	64.97	65.29	64.97	64.27	65.61	64.14	65.04	5.80
	微蝕後	59.14	59.14	59.14	59.55	59.02	59.65	59.67	59.37	59.43	58.90	58.62	59.67	58.62	59.24
6	微蝕前	64.08	62.80	63.83	64.52	64.14	65.09	65.09	64.33	64.90	65.88	63.07	65.88	62.80	64.34	5.03
	微蝕後	58.62	58.79	59.67	60.76	59.61	59.73	58.39	59.37	59.25	59.85	58.39	60.76	58.39	59.31
7	微蝕前	64.14	64.90	65.09	65.09	64.77	63.89	64.27	65.48	65.03	65.61	63.71	65.61	63.71	64.73	5.42
	微蝕後	58.73	59.43	58.27	60.15	58.67	58.90	59.61	59.91	60.73	59.73	58.27	60.73	58.27	59.31
8	微蝕前	64.65	64.46	65.16	64.58	65.30	64.20	65.16	65.22	64.58	64.46	64.14	65.30	64.14	64.72	5.67
	微蝕後	58.79	58.73	58.85	59.55	59.73	59.04	58.67	59.25	58.90	58.25	59.73	59.73	58.25	59.04
9	微蝕前	61.76	61.45	62.67	62.93	62.87	63.27	64.33	63.46	63.20	62.74	60.03	64.33	60.03	62.61	4.04
	微蝕後	58.44	58.39	58.27	56.56	57.65	58.85	59.08	59.49	59.90	58.90	58.79	59.90	56.56	58.57
Bottom Side		1	2	3	4	5	6	7	8	9	10	11	max	min	Avg	Amount
1	微蝕前	61.26	62.93	61.57	63.13	64.39	63.27	63.65	62.67	63.27	64.27	62.34	64.39	61.26	62.98	5.55
	微蝕後	57.21	57.54	57.49	57.38	58.10	56.78	56.94	57.54	57.93	57.65	57.10	58.10	56.78	57.42
2	微蝕前	62.87	64.02	63.95	64.46	64.33	62.60	63.07	63.52	63.13	65.29	63.83	65.29	62.60	63.73	5.55
	微蝕後	57.60	58.16	58.67	57.82	58.73	58.44	57.88	58.73	58.79	57.88	57.27	58.79	57.27	58.18
3	微蝕前	64.39	65.03	64.97	64.97	65.09	64.84	62.93	64.84	64.85	64.27	65.29	65.29	62.93	64.68	5.93
	微蝕後	57.60	59.64	58.56	59.43	58.73	58.27	58.79	58.44	58.56	58.90	59.37	59.64	57.60	58.75
4	微蝕前	63.00	64.58	63.20	65.61	65.61	63.20	64.77	65.55	64.58	64.52	65.16	65.61	63.00	64.53	5.49
	微蝕後	57.65	59.55	59.08	59.31	59.31	58.73	59.20	60.03	58.96	59.68	57.93	60.03	57.65	59.04
5	微蝕前	63.65	64.14	63.95	65.74	64.27	63.77	64.27	64.52	65.35	63.71	63.77	65.74	63.65	64.29	5.53
	微蝕後	57.93	58.96	58.73	59.08	59.02	58.25	59.20	58.79	59.67	58.62	58.10	59.67	57.93	58.76
6	微蝕前	61.64	64.39	64.65	64.58	64.02	64.27	65.35	63.71	64.20	64.97	63.13	65.35	61.64	64.08	5.14
	微蝕後	58.05	57.93	58.50	59.31	59.02	59.02	59.90	58.90	59.37	59.73	58.62	59.90	57.93	58.94
7	微蝕前	63.65	64.08	64.02	63.77	63.58	63.13	64.08	65.09	63.89	63.71	63.40	65.09	63.13	63.85	5.26
	微蝕後	58.73	58.10	58.79	58.62	59.25	58.79	59.08	58.67	58.22	58.96	57.32	59.25	57.32	58.59
8	微蝕前	62.28	63.65	65.22	64.65	64.58	63.77	63.65	64.71	64.08	64.52	63.20	65.22	62.28	64.03	4.86
	微蝕後	58.27	58.67	58.90	58.62	59.37	59.43	59.29	59.25	60.27	59.20	59.55	60.27	58.27	59.17
9	微蝕前	63.52	64.46	64.71	64.52	65.29	63.52	63.52	64.02	63.83	63.77	62.21	65.29	62.21	63.94	5.94
	微蝕後	58.22	57.88	59.14	57.71	58.50	57.32	58.85	57.21	58.39	57.71	57.10	59.14	57.10	58.00
			Max	Min	R	S	Average	Uniformity		Etch Amount (Avg)
	Top Side	微蝕前	65.88	60.03	5.85	1.12	63.96	4.57%		5.03
		微蝕後	60.76	56.56	4.20	0.71	58.93	3.56%
	Bottom Side	微蝕前	65.74	61.26	4.48	0.92	64.01	3.50%		5.47
		微蝕後	60.27	56.78	3.49	0.77	58.54	2.98%