板編號#3
槽液濃度		H2SO4=167g/L				溫度35.00Degree C
		H2O2=57g/L				線速1.0m / min
		Cu=<40g/L
TOP Side		1	2	3	4	5	6	7	8	9	10	11	max	min	Avg	Amount
1	微蝕前	64.46	63.40	65.35	64.33	64.71	63.89	64.02	64.65	63.07	64.27	63.77	65.35	63.07	64.17	6.08
	微蝕後	57.10	57.32	59.20	57.82	58.33	58.62	58.67	59.14	58.90	57.77	56.14	59.20	56.14	58.09
2	微蝕前	64.90	64.65	65.55	65.16	64.27	64.65	64.46	65.16	65.74	63.33	63.95	65.74	63.33	64.71	6.32
	微蝕後	56.62	58.33	58.82	58.33	58.33	58.28	58.39	58.62	58.79	59.14	58.62	59.14	56.62	58.39
3	微蝕前	64.33	63.95	63.71	63.89	64.97	64.02	65.29	64.14	63.58	64.52	64.46	65.29	63.58	64.26	5.56
	微蝕後	57.99	58.62	58.50	58.56	58.39	58.85	58.73	58.90	58.90	59.73	58.50	59.73	57.99	58.70
4	微蝕前	64.08	64.14	64.33	64.84	64.65	65.09	64.52	64.33	66.68	64.84	64.46	66.68	64.08	64.72	6.04
	微蝕後	57.88	58.90	58.99	59.08	58.62	58.73	58.79	59.02	59.38	58.16	57.99	59.38	57.88	58.69
5	微蝕前	64.02	65.03	65.16	65.03	65.35	64.71	63.95	65.16	64.71	64.14	64.14	65.35	63.95	64.67	6.09
	微蝕後	56.88	59.02	57.77	57.82	58.32	59.08	59.55	59.37	59.20	59.20	58.16	59.55	56.88	58.58
6	微蝕前	64.52	64.65	64.14	65.48	65.29	64.65	63.52	64.77	65.61	64.14	62.80	65.61	62.80	64.51	5.86
	微蝕後	58.62	58.44	58.79	59.20	58.56	58.25	58.96	59.43	58.73	58.85	57.32	59.43	57.32	58.65
7	微蝕前	64.71	64.27	64.14	63.95	65.09	64.77	64.02	64.52	63.77	65.16	63.52	65.16	63.52	64.36	6.45
	微蝕後	57.43	56.83	58.22	58.33	58.73	57.93	58.62	58.05	57.65	57.77	57.38	58.73	56.83	57.90
8	微蝕前	63.40	64.14	64.08	64.14	63.71	64.14	63.95	64.27	64.02	64.39	64.33	64.39	63.40	64.05	5.67
	微蝕後	57.32	58.77	58.79	57.88	57.99	58.27	58.22	58.56	59.65	59.31	57.49	59.65	57.32	58.39
9	微蝕前	61.83	63.95	64.52	62.08	62.34	62.18	64.71	63.52	64.14	64.20	61.26	64.71	61.26	63.16	5.95
	微蝕後	56.36	58.39	56.62	59.85	56.29	58.67	56.72	57.05	55.77	56.80	56.72	59.85	55.77	57.20
Bottom Side		1	2	3	4	5	6	7	8	9	10	11	max	min	Avg	Amount
1	微蝕前	64.77	63.95	63.83	64.33	65.03	64.39	65.22	64.65	63.07	63.83	63.07	65.22	63.07	64.19	5.89
	微蝕後	57.77	57.65	59.39	58.10	59.37	58.06	58.56	59.20	57.54	58.16	57.60	59.39	57.54	58.31
2	微蝕前	63.52	64.90	64.77	65.68	64.58	64.52	65.29	64.33	64.20	64.27	63.71	65.68	63.52	64.52	6.01
	微蝕後	57.54	58.27	58.33	58.85	58.33	59.43	59.73	58.44	58.85	58.56	57.38	59.73	57.38	58.52
3	微蝕前	63.27	64.46	64.71	65.02	65.16	63.65	63.40	64.71	64.58	64.58	64.27	65.16	63.27	64.35	6.29
	微蝕後	57.16	57.54	57.99	57.65	58.73	58.67	57.93	58.33	58.96	58.22	57.43	58.96	57.16	58.06
4	微蝕前	63.71	64.27	64.77	65.29	65.22	65.09	65.65	64.65	65.48	64.90	64.58	65.65	63.71	64.87	6.24
	微蝕後	56.83	58.16	59.61	59.31	58.22	59.49	58.33	58.96	59.25	58.50	58.33	59.61	56.83	58.64
5	微蝕前	62.80	63.54	63.89	64.90	64.27	63.71	63.71	64.33	65.55	63.95	65.42	65.55	62.80	64.19	6.03
	微蝕後	57.43	58.10	58.39	58.73	58.67	59.61	57.71	58.10	57.71	57.60	57.65	59.61	57.43	58.15
6	微蝕前	65.22	64.90	64.46	64.71	65.22	64.90	64.39	65.03	63.83	64.77	65.81	65.81	63.83	64.84	6.65
	微蝕後	57.88	58.50	58.73	58.73	57.54	57.82	57.71	58.85	58.05	58.73	57.60	58.85	57.54	58.19
7	微蝕前	64.52	64.84	64.52	65.94	64.65	65.61	63.52	65.42	65.81	64.84	64.27	65.94	63.52	64.90	6.80
	微蝕後	57.82	57.54	58.39	59.02	58.11	58.44	57.93	58.27	58.39	57.88	57.38	59.02	57.38	58.11
8	微蝕前	64.97	63.71	64.27	63.52	64.84	64.71	63.89	64.20	65.08	64.52	63.71	65.08	63.52	64.31	6.52
	微蝕後	57.88	57.99	57.60	57.50	57.88	57.71	58.33	57.43	57.82	58.05	57.54	58.33	57.43	57.79
9	微蝕前	62.80	63.89	63.33	61.13	61.89	63.52	63.65	62.47	64.90	64.20	62.41	64.90	61.13	63.11	7.46
	微蝕後	54.45	55.20	52.11	56.08	55.05	56.03	56.88	57.05	56.67	56.99	55.61	57.05	52.11	55.65
			Max	Min	R	S	Average	Uniformity		Etch Amount (Avg)
	Top Side	微蝕前	66.68	61.26	5.42	0.83	64.29	4.22%		6.00
		微蝕後	59.85	55.77	4.08	0.86	58.29	3.50%
	Bottom Side	微蝕前	65.94	61.13	4.81	0.86	64.37	3.74%		6.43
		微蝕後	59.73	52.11	7.62	1.11	57.94	6.58%