板編號#3
槽液濃度		H2SO4=167g/L				溫度37.00Degree C
		H2O2=57g/L				線速1.0m / min
		Cu=<40g/L
TOP Side		1	2	3	4	5	6	7	8	9	10	11	max	min	Avg	Amount
1	微蝕前	64.20	64.14	64.20	64.65	63.95	63.58	65.22	65.55	65.03	63.71	64.84	65.55	63.58	64.46	6.60
	微蝕後	57.27	57.10	57.99	57.99	57.88	57.71	58.44	58.10	58.73	57.05	58.22	58.73	57.05	57.86
2	微蝕前	63.77	64.08	64.84	63.27	64.52	65.03	65.48	65.28	64.52	64.58	63.71	65.48	63.27	64.46	7.13
	微蝕後	55.98	56.94	56.94	57.82	58.44	56.88	58.62	57.54	57.44	57.93	56.14	58.62	55.98	57.33
3	微蝕前	64.33	64.27	64.14	64.52	64.20	64.33	64.27	65.16	63.71	65.09	64.33	65.16	63.71	64.40	6.98
	微蝕後	56.51	57.38	57.32	57.38	58.33	57.65	57.65	57.93	57.05	57.43	56.99	58.33	56.51	57.42
4	微蝕前	63.77	65.35	64.71	64.85	65.29	64.58	64.90	64.27	63.95	64.84	65.16	65.35	63.77	64.70	7.21
	微蝕後	57.32	56.94	58.10	57.99	57.77	57.10	57.16	56.78	58.16	58.05	56.99	58.16	56.78	57.49
5	微蝕前	64.20	65.08	65.48	64.97	65.88	66.08	64.20	65.42	64.33	66.41	64.27	66.41	64.20	65.12	7.35
	微蝕後	56.45	57.93	57.99	58.22	59.02	57.10	57.27	57.27	57.82	58.96	57.43	59.02	56.45	57.77
6	微蝕前	64.02	64.39	64.77	64.46	64.58	64.84	64.58	65.55	65.22	64.58	63.83	65.55	63.83	64.62	6.72
	微蝕後	57.77	56.99	58.27	58.33	57.43	56.99	57.93	57.43	58.33	58.56	58.90	58.90	56.99	57.90
7	微蝕前	63.27	64.52	63.59	64.65	64.52	65.97	64.46	64.84	65.16	64.27	64.39	65.97	63.27	64.51	6.75
	微蝕後	57.05	57.43	57.88	57.99	58.16	57.77	57.62	57.32	58.39	58.85	56.94	58.85	56.94	57.76
8	微蝕前	63.95	63.82	64.84	63.77	64.46	64.46	64.20	64.39	63.89	65.68	64.27	65.68	63.77	64.34	6.83
	微蝕後	57.77	56.67	57.05	58.33	56.88	57.73	57.77	58.10	57.54	57.00	57.71	58.33	56.67	57.50
9	微蝕前	63.27	63.82	63.89	63.46	62.47	63.46	63.20	63.27	63.65	63.13	63.27	63.89	62.47	63.35	7.18
	微蝕後	55.46	56.72	57.27	56.35	55.77	57.21	57.32	56.67	56.14	55.20	53.76	57.32	53.76	56.17
Bottom Side		1	2	3	4	5	6	7	8	9	10	11	max	min	Avg	Amount
1	微蝕前	63.71	64.02	63.52	64.84	63.89	64.08	64.02	64.08	64.38	64.71	63.00	64.84	63.00	64.02	7.25
	微蝕後	55.82	56.88	57.60	57.16	53.83	57.27	57.10	56.40	57.99	56.99	57.49	57.99	53.83	56.78
2	微蝕前	63.80	64.52	63.95	64.58	63.83	64.39	64.54	64.39	64.58	65.42	64.02	65.42	63.80	64.37	7.03
	微蝕後	56.88	57.27	56.78	57.16	57.21	57.99	57.49	57.99	57.32	57.77	56.88	57.99	56.78	57.34
3	微蝕前	63.52	64.46	64.20	64.46	64.14	64.97	64.71	65.55	65.22	63.95	65.22	65.55	63.52	64.58	7.48
	微蝕後	57.05	57.65	56.99	56.99	57.05	58.10	56.72	57.60	56.83	56.83	56.29	58.10	56.29	57.10
4	微蝕前	63.65	64.77	64.97	65.35	64.84	64.33	64.90	65.48	65.88	65.35	64.27	65.88	63.65	64.89	7.28
	微蝕後	56.35	58.10	57.82	56.83	58.10	58.33	57.43	58.16	58.05	57.77	56.72	58.33	56.35	57.61
5	微蝕前	64.80	65.02	64.65	64.90	64.39	64.71	64.90	64.84	65.55	65.88	64.52	65.88	64.39	64.92	7.91
	微蝕後	56.40	56.78	57.21	57.54	57.88	57.77	57.54	57.82	57.71	57.54	52.94	57.88	52.94	57.01
6	微蝕前	63.77	64.02	65.68	65.09	65.05	65.48	65.16	65.81	64.02	66.28	65.16	66.28	63.77	65.05	7.32
	微蝕後	57.05	57.32	57.88	59.08	57.77	57.60	57.88	58.22	57.54	57.77	56.94	59.08	56.94	57.73
7	微蝕前	63.89	64.33	63.65	64.39	65.09	64.20	64.52	64.58	65.03	65.29	64.02	65.29	63.65	64.45	7.50
	微蝕後	56.03	58.05	57.43	56.67	57.88	57.10	56.72	56.40	57.21	56.51	56.45	58.05	56.03	56.95
8	微蝕前	63.07	62.93	63.52	64.33	63.58	63.71	65.81	64.71	65.42	65.58	64.65	65.81	62.93	64.30	7.50
	微蝕後	56.67	56.40	57.05	56.08	57.27	57.10	56.51	57.16	57.32	56.88	56.35	57.32	56.08	56.80
9	微蝕前	61.64	63.07	62.93	60.51	61.38	62.34	63.13	61.83	61.13	64.02	60.33	64.02	60.33	62.03	5.95
	微蝕後	55.20	55.66	55.35	56.24	56.51	57.27	56.35	57.16	56.62	55.25	55.25	57.27	55.20	56.08
			Max	Min	R	S	Average	Uniformity		Etch Amount (Avg)
	Top Side	微蝕前	66.41	62.47	3.94	0.72	64.44	3.06%		6.97
		微蝕後	59.02	53.76	5.26	0.83	57.47	4.58%
	Bottom Side	微蝕前	66.28	60.33	5.95	1.11	64.29	4.63%		7.25
		微蝕後	59.08	52.94	6.14	0.90	57.04	5.38%