板編號#3
槽液濃度		H2SO4=167g/L				溫度40.00Degree C
		H2O2=57g/L				線速1.0m / min
		Cu=<40g/L
TOP Side		1	2	3	4	5	6	7	8	9	10	11	max	min	Avg	Amount
1	微蝕前	63.89	63.40	62.87	63.46	63.58	64.14	63.00	63.65	63.52	64.52	64.14	64.52	62.87	63.65	7.27
	微蝕後	56.45	56.35	56.29	56.40	56.19	56.88	55.82	55.87	57.54	56.88	55.51	57.54	55.51	56.38
2	微蝕前	63.27	63.95	64.33	64.58	64.39	63.83	63.77	64.46	63.95	64.08	64.20	64.58	63.27	64.07	7.43
	微蝕後	55.15	55.82	57.38	56.72	56.72	56.99	57.65	57.21	56.62	56.62	56.19	57.65	55.15	56.64
3	微蝕前	64.14	64.46	64.14	64.39	64.52	63.83	64.33	65.88	63.77	64.77	64.46	65.88	63.77	64.43	7.61
	微蝕後	56.19	56.51	57.16	56.99	57.16	56.83	56.83	57.05	57.77	56.03	56.51	57.77	56.03	56.82
4	微蝕前	62.93	65.69	65.48	64.71	64.52	64.77	64.84	64.71	65.29	65.22	64.97	65.69	62.93	64.83	7.54
	微蝕後	56.45	56.99	57.49	57.21	57.60	58.62	57.08	57.05	57.27	57.71	56.72	58.62	56.45	57.29
5	微蝕前	63.95	64.14	64.08	64.39	64.90	65.29	65.22	65.22	65.94	65.68	64.84	65.94	63.95	64.88	7.44
	微蝕後	57.54	58.05	57.93	58.05	56.88	57.27	58.16	56.56	57.10	57.05	57.27	58.16	56.56	57.44
6	微蝕前	63.78	64.58	64.14	64.84	64.33	65.48	64.77	64.90	64.21	64.58	64.46	65.48	63.78	64.55	7.21
	微蝕後	56.51	57.49	57.82	57.21	56.99	57.32	58.05	58.22	57.27	56.14	57.71	58.22	56.14	57.34
7	微蝕前	63.40	63.27	65.35	64.33	65.48	64.71	64.97	64.20	64.62	65.08	64.53	65.48	63.27	64.54	7.35
	微蝕後	56.29	58.85	56.72	57.54	57.21	56.60	57.16	57.16	56.83	57.99	56.72	58.85	56.29	57.19
8	微蝕前	61.57	64.46	65.29	65.03	64.84	65.09	64.97	63.46	64.46	64.08	65.03	65.29	61.57	64.39	7.11
	微蝕後	56.51	57.82	57.21	56.67	55.66	57.88	58.05	57.60	57.21	57.82	57.65	58.05	55.66	57.28
9	微蝕前	62.47	64.52	63.46	64.46	64.52	64.65	65.09	64.84	63.89	65.35	65.03	65.35	62.47	64.39	7.98
	微蝕後	56.78	56.51	56.83	55.93	56.24	55.51	56.72	56.35	56.56	57.16	55.93	57.16	55.51	56.41
Bottom Side		1	2	3	4	5	6	7	8	9	10	11	max	min	Avg	Amount
1	微蝕前	61.26	61.70	62.28	62.15	61.45	62.34	62.93	62.93	61.64	63.13	62.54	63.13	61.26	62.21	6.80
	微蝕後	55.46	55.10	55.15	55.30	54.80	56.19	54.14	55.25	56.14	56.14	55.90	56.19	54.14	55.42
2	微蝕前	62.67	63.33	63.65	63.95	63.33	63.77	62.15	64.33	64.08	63.33	64.08	64.33	62.15	63.52	7.40
	微蝕後	55.72	57.16	56.99	56.19	56.62	56.40	55.56	55.55	55.05	56.35	55.72	57.16	55.05	56.12
3	微蝕前	63.58	64.77	64.08	63.00	63.07	64.97	64.39	63.33	64.46	63.58	64.58	64.97	63.00	63.98	7.20
	微蝕後	55.77	56.93	56.56	57.32	56.40	57.16	56.19	57.71	56.35	57.10	57.10	57.71	55.77	56.78
4	微蝕前	62.74	64.58	63.52	64.90	64.39	63.83	63.95	63.83	63.80	63.65	64.52	64.90	62.74	63.97	7.58
	微蝕後	55.66	56.40	57.38	56.03	56.72	57.16	56.02	56.56	56.51	56.78	55.10	57.38	55.10	56.39
5	微蝕前	63.95	64.77	63.89	64.02	64.20	64.65	64.27	63.40	63.89	63.71	64.46	64.77	63.40	64.11	7.82
	微蝕後	55.05	56.78	56.45	56.94	56.67	55.93	56.45	56.19	56.45	56.15	56.08	56.94	55.05	56.29
6	微蝕前	63.77	64.65	63.52	64.14	63.62	63.33	63.65	63.65	63.83	64.33	62.74	64.65	62.74	63.75	7.87
	微蝕後	55.05	56.24	56.40	56.24	55.82	55.82	56.29	55.98	56.08	55.46	55.30	56.40	55.05	55.88
7	微蝕前	63.65	63.00	62.93	63.83	64.14	63.58	64.33	64.52	64.05	64.27	63.46	64.52	62.93	63.80	7.63
	微蝕後	55.25	56.51	55.72	55.98	55.72	56.19	56.35	56.94	56.45	56.94	55.77	56.94	55.25	56.17
8	微蝕前	63.46	63.58	64.77	63.27	64.20	63.33	63.00	63.77	63.77	64.08	64.02	64.77	63.00	63.75	7.22
	微蝕後	55.72	56.03	56.56	56.35	57.27	56.35	56.67	56.94	56.83	56.14	56.99	57.27	55.72	56.53
9	微蝕前	62.47	63.33	63.13	61.20	62.08	63.46	62.15	61.26	62.28	62.67	62.47	63.46	61.20	62.41	7.74
	微蝕後	54.20	55.10	55.35	53.86	53.37	55.41	53.18	55.35	55.25	56.62	53.62	56.62	53.18	54.66
			Max	Min	R	S	Average	Uniformity		Etch Amount (Avg)
	Top Side	微蝕前	65.94	61.57	4.37	0.75	64.41	3.39%		7.44
		微蝕後	58.85	55.15	3.70	0.71	56.98	3.25%
	Bottom Side	微蝕前	64.97	61.20	3.77	0.87	63.50	2.97%		7.47
		微蝕後	57.71	53.18	4.53	0.87	56.03	4.04%